Zeiss optical microscope (Axio Imager A2m)

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Nikon optical microscope (Optiphot 66)

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Electron beam writer attachment (Raith Elphy Quantum)

Electron beam writer attachment (Raith Elphy Quantum) for the field emission SEM (Jeol 7000F)

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Spinner up to 6” (Suss MicroTec LabSpin 6BM)

Two programmable spinners up to 6” (Suss MicroTec LabSpin 6BM)

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Hot plate with vacuum (UniTemp GmbH VHP-210-160)

Two programmable hot plates with vacuum (UniTemp GmbH VHP-210-160)

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Asher (Plasmaetch BE 50)

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Programmable 3-stage tube furnace

Programmable 3-stage tube furnace (Carbolite)

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